Work

Influence of aluminum additions on phase formation in boron nitride films deposited by magnetron sputtering

Year: 2003

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.1538322

Authors: Th. Pfeifer, F. Richter, Th. Welzel, H. Kupfer, P. Willich

Institutions: Chemnitz University of Technology, Fraunhofer Institute for Surface Engineering and Thin Films

Language: English

Topic: Boron and Carbon Nanomaterials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Deutsche Forschungsgemeinschaft

OpenAlex ID: W2004803581

FWCI: 1.273

Cites: 15

Cited by: 10

Related to: 10