Work

Meeting the Challenges of Elemental Analysis in 90nm & Beyond Technologies - Case Studies of Scanning Auger Nanoprobe

Year: 2006

Type: conference-paper

Source: IEEE International Conference on Semiconductor Electronics

DOI: 10.1109/smelec.2006.380740

Authors: Nistala Ramesh Rao, Tan Chin Wang, Song Zhigang, Hua Younan, Zhao Siping

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2004997220

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