Work

Measurements of radical densities in radio-frequency fluorocarbon plasmas using infrared absorption spectroscopy

Year: 1994

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.578943

Authors: M. Haverlag, E. Stoffels, W. W. Stoffels, G. M. W. Kroesen, F. J. de Hoog

Institution: Eindhoven University of Technology

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005289471

FWCI: 3.355

Cites:

Cited by: 71

Related to: 10