Polynomial control technique for adaptive positioning within sub-micrometer scale
Year: 2010
Type: conference-paper
Authors: G. Skorc, R. Safaric, A. Rojko
Institution: University of Maribor
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funders: European Commission, European Social Fund
OpenAlex ID: W2005491782