Work

Characterization of dry developed processes using silylation application to the PRIME process

Year: 1990

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.20095

Authors: Christophe Pierrat, Hubert Bono, Francoise Vinet, Thierry Mourier, Michele Chevallier, Jean C. Guibert

Institutions: CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2006183993

FWCI: 3.55

Cites:

Cited by: 6

Related to: 10