Effects of Thermal History on Microdefect Formation in Czochralski Silicon Crystals
Year: 1985
Type: article
DOI: 10.1143/jjap.24.1594
Authors: Yasushi Shimanuki, Hisashi Furuya, Isamu Suzuki, Koji Murai
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2006389341
