Work

Cold ion-cutting of hydrogen implanted Si

Year: 2002

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/s0168-583x(01)01209-5

Authors: K. Henttinen, T. Suni, A. Nurmela, I. Suni, S.S. Lau, T. Höchbauer, M. Nastasi, V.-M. Airaksinen

Institutions: VTT Technical Research Centre of Finland, University of California San Diego, Los Alamos National Laboratory, Okmetic (Finland)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, University of California, San Diego

OpenAlex ID: W2007251069

FWCI: 3.462

Cites: 10

Cited by: 18

Related to: 10