Materials interactions in the integration of PZT ferroelectric capacitors
Year: 1995
Type: article
Source: Integrated ferroelectrics
Authors: R. E. Jones, P. D. Maniar, A. C. Campbell, R. Moazzami, J. L. Dupuie, R. B. Gregory, M. L. Kottke, M. L. Bozack, J. R. Williams, J. M. Ferrero
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2007639632
