Work

Ion sources for large area processing (invited)

Year: 2000

Type: article

Source: Review of Scientific Instruments

DOI: 10.1063/1.1150377

Authors: M. Naito, Y. Ando, Y. Inouchi, H. Tanaka, N. Miyamoto

Institution: Nissin Ion Equipment Co., Ltd. (Japan)

Language: English

Topic: Particle accelerators and beam dynamics

Subfield: Nuclear and High Energy Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2007705755

FWCI: 0.351

Cites: 2

Cited by: 6

Related to: 10