Work

Anomalous depth distributions of bulk microdefects in heat-treated Czochralski silicon wafers due to nonequilibrium self-interstitials

Year: 1995

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.358610

Authors: Yuhki Satoh, Hisashi Furuya, Mikio Kadoi, Yasushi Shimanuki

Institution: Mitsubishi Materials (Japan)

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2008000862

FWCI: 2.315

Cites: 26

Cited by: 8

Related to: 10