Work

Impact of Defects on the Technology of Highly Integrated Circuits

Year: 1989

Type: article

Source: Materials science forum

DOI: 10.4028/www.scientific.net/msf.38-41.1

Authors: Bernd O. Kolbesen, Werner Bergholz, H. Wendt

Institutions: Goethe University Frankfurt, Constructor University, Technische Universität Darmstadt

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

OpenAlex ID: W2008933705

FWCI: 0.944

Cites:

Cited by: 10

Related to: 10