Time-resolved investigation of an asymmetric bipolar pulsed magnetron discharge: Influence of pressure
Year: 2005
Type: article
Source: Surface and Coatings Technology
Authors: Th. Dunger, Th. Welzel, St. Welzel, F. Richter
Institution: Chemnitz University of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2010217124