Work

Mirror electron microscope for inspecting nanometer-sized defects in magnetic media

Year: 2008

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2008.05.018

Authors: T. Shimakura, Y. Takahashi, M. Sugaya, T. Ohnishi, M. Hasegawa, H. Ohta

Institution: Hitachi (Japan)

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: New Energy and Industrial Technology Development Organization

OpenAlex ID: W2010696090

FWCI: 1.369

Cites: 4

Cited by: 21

Related to: 10