Work

Tracking of design related defects hidden by random defectivity in production environment

Year: 2010

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.848763

Authors: J. C. Le Denmat, V. Charbois, L. Tetar, M. C. Luche, G. Kerrien, F. Robert, E. Yesilada, F. Foussadier, L. Couturier, L. Karsenti, M. Geshel

Institutions: STMicroelectronics (France), Applied Materials (Israel)

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2010907360

FWCI: 2.161

Cites:

Cited by: 4

Related to: 10