Work

Room temperature fabrication of ZnO/ST-cut quartz SAW UV photodetector with small temperature coefficient

Year: 2015

Type: article

Abstract: Room-temperature fabricated ZnO/ST-cut quartz is adopted for SAW ultraviolet (UV) photodetector. The ST-cut quartz substrate and ZnO layer are used for SAW excitation and photodetection, respectively. High resolution x-ray diffraction (XRD) and photoluminescence (PL) measurement indicate that high quality ZnO films can be deposited on ST-cut quartz using radio frequency (RF) sputtering. As the SAW devices under UV illumination (6 mW/cm(2)), a downshift in frequency of about 35 KHz can be observed. The observed small temperature coefficient of frequency (TCF) indicates that SAW devices exhibit good temperature stability. The results present feasibility of using ZnO/ST-cut quartz SAW photodetectors in ultraviolet region.

Source: Optics Express

DOI: 10.1364/oe.23.002187

Authors: Wen-Che Tsai, Hui-ling Kao, Kun-Hsu Liao, Yu-Hao Liu, Tzu-Ping Lin, Erik S. Jeng

Institution: Chung Yuan Christian University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

Funder: National Science Council