Work

Step Coverage and Electrical Properties of (Ba, Sr)TiO3 Films Prepared by Liquid Source Chemical Vapor Deposition Using TiO(DPM)2

Year: 1994

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.33.5129

Authors: Takaaki Kawahara, Mikio Yamamuka, Tetsuro Makita, Jiro Naka, Akimasa Yuuki, Noboru Mikami Noboru Mikami, Kouichi Ono Kouichi Ono

Institution: Mitsubishi Electric (Japan)

Language: English

Topic: Ferroelectric and Piezoelectric Materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2012223571

FWCI: 8.106

Cites: 10

Cited by: 101

Related to: 10