Computer Simulation of Point-Defect Fields and Microdefect Patterns in Czochralski-Grown Si Crystals
Year: 2002
Type: article
DOI: 10.1143/jjap.41.464
Institution: Mitsubishi Materials (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2013043816
