Work

Quantitative nanomechanical measurement of electron beam surface modification

Year: 2015

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2190984

Authors: Aaron Cordes, Benjamin Bunday, Cecilia Montgomery, Jason Osborne, Sean Hand

Institution: Bruker (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2013201602

FWCI:

Cites: 6

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Related to: 10