High-Performance and Low-Power CMOS Device Technologies Featuring Metal/High-k Gate Stacks with Uniaxial Strained Silicon Channels on (100) and (110) Substrates
Year: 2006
Type: conference-paper
Authors: Y. Tateshita, J. Wang, K. Nagano, T. Hirano, Y. Miyanami, T. Ikuta, T. Kataoka, Y. Kikuchi, S. Yamaguchi, T. Ando, K. Tai, R. Matsumoto, S. Fujita, C. Yamane, R. Yamamoto, S. Kanda, K. Kugimiya, T. Kimura, T. Ohchi, Y. Yamamoto, Y. Nagahama, Y. Hagimoto, H. Wakabayashi, Y. Tagawa, M. Tsukamoto, H. Iwamoto, M. Saito, S. Kadomura, N. Nagashima
Institution: Sony (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2013318463
