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Highly reliable 198-nm light source for semiconductor inspection based on dual fiber lasers

Year: 2010

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.840467

Authors: Shinichi Imai, Kazuto Matsuki, Nobutaka Kikuiri, Katsuhiko Takayama, Osamu Iwase, Yoshiharu Urata, Tatsuya Shinozaki, Yoshio Wada, Satoshi Wada

Institutions: Nuflare Technology, Inc. (Japan), Megaopto Co., Ltd. (Japan)

Language: English

Topic: Semiconductor Lasers and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2013400727

FWCI: 1.283

Cites:

Cited by: 8

Related to: 10