Work

Etching procedures of GaAs: Cathodoluminescence study of the induced damages and of the recovering techniques

Year: 1990

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

DOI: 10.1116/1.585035

Authors: A. C. Papadopoulo, C. Dubon-Chevallier, J. F. Bresse, A. M. Duchenois, F. Heliot

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2013779679

FWCI: 0.557

Cites:

Cited by: 4

Related to: 10