Free standing silicon microstructures for soft x-ray masks and cold atom focusing
Year: 1990
Type: article
DOI: 10.1116/1.584886
Authors: D. M. Tennant, J. E. Bjorkholm, M. L. O’Malley, M. M. Becker, J. A. Gregus, R. W. Epworth
Institution: AT&T (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2013885757