Work

High-rate sputtering of thick PZT thin films for MEMS

Year: 2010

Type: article

Source: Journal of Electroceramics

DOI: 10.1007/s10832-010-9615-6

Authors: Harald Jacobsen, Klaus Prume, Bernhard Wagner, Kai Ortner, Thomas Jung

Institutions: Christian-Albrechts-Universität zu Kiel, aixACCT Systems (Germany), Fraunhofer Institute for Silicon Technology, Fraunhofer Institute for Surface Engineering and Thin Films

Language: English

Topic: Ferroelectric and Piezoelectric Materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2014430992

FWCI: 0.973

Cites: 11

Cited by: 21

Related to: 10