Work

Evaluation of elastic properties of submicrometer thin films using slanted finger interdigital transducers

Year: 2005

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.1865319

Authors: Tsung-Tsong Wu, Yung-Yu Chen, Guo-Tsai Huang, Pei-Zen Chang

Institution: National Taiwan University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Council

OpenAlex ID: W2014586902

FWCI: 0.74

Cites: 16

Cited by: 12

Related to: 10