Work

How to analyze high‐aspect ratio pits with the coaxial scanning auger microprobe

Year: 1995

Type: article

Source: Scanning

DOI: 10.1002/sca.4950170303

Authors: D. S. Kibalov, V. K. Smirnov

Institution: Russian Academy of Sciences

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2014912969

FWCI: 0.781

Cites: 1

Cited by: 3

Related to: 10