High-etch-rate ArF BARC composed of polyester
Year: 2004
Type: conference-paper
DOI: 10.1117/12.534763
Authors: Young Sun Hwang, Jae Chang Jung, Keun Do Ban, Sarohan Park, Cheol Kyu Bok, Seung Chan Moon, Ki Soo Shin
Institution: SK Hynix (South Korea)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2015215249