Work

Pressure stability in reactive magnetron sputtering

Year: 1988

Type: article

Source: Thin Solid Films

DOI: 10.1016/0040-6090(88)90310-0

Authors: A.G. Spencer, R.P. Howson, R.W. Lewin

Institution: Loughborough University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2015281835

FWCI: 8.787

Cites: 10

Cited by: 64

Related to: 10