Work

Seed Layer and Multistack Approaches to Reduce Leakage in SrTiO3-Based Metal–Insulator–Metal Capacitors Using TiN Bottom Electrode

Year: 2010

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.49.04dd01

Authors: Nicolas Menou, Mihaela Popovici, Karl Opsomer, Ben Kaczer, Malgorzata A. Pawlak, Christoph Adelmann, Alexis Franquet, Paola Favia, Hugo Bender, Christophe Detavernier, Sven Van Elshocht, Dirk J. Wouters, Serge Biesemans, Jorge A. Kittl

Institutions: IMEC, Ghent University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2015307330

FWCI: 0.953

Cites: 4

Cited by: 13

Related to: 10