Reference metrology in a research fab: the NIST clean calibrations thrust
Year: 2009
Type: conference-paper
DOI: 10.1117/12.815499
Authors: Ronald Dixson, Joe Fu, Ndubuisi Orji, Thomas Renegar, Alan Zheng, Theodore Vorburger, Al Hilton, Marc Cangemi, Lei Chen, Mike Hernandez, Russell Hajdaj, Michael Bishop, Aaron Cordes
Institution: National Institute of Standards and Technology
Language: English
Subfield: Mechanical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2015951677