Work

Density estimation for amorphous carbon nanopillars grown by focused ion beam assisted chemical vapor deposition

Year: 2002

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.1526699

Authors: Masahiko Ishida, Jun-ichi Fujita, Yukinori Ochiai

Institution: NEC (Japan)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2016362330

FWCI: 3.095

Cites: 7

Cited by: 56

Related to: 10