The formation and control of direct current magnetron discharges for the high-rate reactive processing of thin films
Year: 1989
Type: article
DOI: 10.1116/1.576260
Authors: R. P. Howson, A. G. Spencer, K. Oka, R. W. Lewin
Institution: Loughborough University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2016850843