Work

Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers

Year: 2003

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/j.nimb.2003.11.043

Authors: T. Höchbauer, A. Misra, M. Nastasi, K. Henttinen, T. Suni, I. Suni, S.S. Lau, W. Ensinger

Institutions: Los Alamos National Laboratory, VTT Technical Research Centre of Finland, University of California San Diego, Philipps University of Marburg

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Basic Energy Sciences

OpenAlex ID: W2016915263

FWCI: 1.506

Cites: 11

Cited by: 20

Related to: 10