Cantilever influence suppression of contactless IC-testing by electric force microscopy
Year: 1998
Type: article
Source: Microelectronics Reliability
Authors: V. Wittpahl, U. Behnke, B. Wand, W. Mertin
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2017284550