Work

Progress toward a high-brightness photoemission source for multiple-electron beam lithography

Year: 2001

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.1420202

Authors: S. T. Coyle, A. Fernandez, G. Janaway, A. Sagle, M. Mankos

Language: English

Topic: Photocathodes and Microchannel Plates

Subfield: Instrumentation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2017308566

FWCI: 3.407

Cites: 4

Cited by: 6

Related to: 10