6F2 buried wordline DRAM cell for 40nm and beyond
Year: 2008
Type: conference-paper
Authors: T. Schloesser, F. Jakubowski, J. v. Kluge, A. Graham, S. Slesazeck, M. Popp, P. Baars, K. Muemmler, P. Moll, K. Wilson, A. Buerke, D. Koehler, J. Radecker, E. Erben, U. Zimmermann, T. Vorrath, B. Fischer, G. Aichmayr, R. Agaiby, W. Pamler, T. Schuster, W. Bergner, W. Mueller
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2017525960