Work

Three-dimensional multilayered microstructure fabricated by imprint lithography

Year: 2005

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.1861929

Authors: H. Ooe, M. Morimatsu, T. Yoshikawa, H. Kawata, Y. Hirai

Institutions: Osaka Prefecture University, Murata (Japan)

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2018305405

FWCI: 4.437

Cites: 7

Cited by: 25

Related to: 10