Work

Silicon template fabrication for imprint process with good demolding characteristics

Year: 2008

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2008.11.030

Authors: Hiroaki Kawata, Masato Matsue, Kensuke Kubo, Masaaki Yasuda, Yoshihiko Hirai

Institution: Osaka Prefecture University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2019794222

FWCI: 1.105

Cites: 8

Cited by: 25

Related to: 10