Work

Determination of the electron beam irradiated area by using a new procedure deriving from the electron beam lithography technique

Year: 2005

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/j.nimb.2005.01.004

Authors: K. Zarbout, G. Moya, A. Kallel

Institutions: Centre National de la Recherche Scientifique, Aix-Marseille Université, University of Sfax

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2020397934

FWCI:

Cites: 20

Cited by: 6

Related to: 10