Properties of ITO thin films deposited on amorphous and crystalline substrates with e-beam evaporation
Year: 2004
Type: article
Abstract: Indium tin oxide (ITO) thin films were deposited using the e-beam evaporation method on amorphous and crystalline substrates under identical conditions. The properties of the films were investigated using optical transmittance, XRD and XPS techniques. It was found that the properties of the films depend strongly on the nature of the substrate surface. Analysis suggests that changes in chemical composition and microstructure of the ITO films deposited on crystalline and amorphous substrates are responsible for the differences in optical properties.
Authors: R X Wang, C D Beling, A B Djuri i, S Li, S Fung
Institution: University of Hong Kong
Language: English
Topic: ZnO doping and properties
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2020621706