Comparison of low temperature polysilicon crystal growth on low cost substrates
Year: 1991
Type: article
DOI: 10.1116/1.577504
Authors: W. Czubatyj, D. Beglau, B. S. Chao, J. Gonzalez-Hernandez, D. A. Pawlik, P. Klersy, D. Jablonski, R. Himmler
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W2024909336