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Quantitative Film Thickness Measurement Using Scintillator/Photomultiplier Backscattered Electron Detectors. Possible or Not?

Year: 2005

Type: article

Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Source: Microscopy and Microanalysis

DOI: 10.1017/s1431927605507670

Authors: P Hovington, M Lagacé, P Noël

Institution: Hydro-Québec

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W2024942109

FWCI:

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