Young’s modulus, Poisson’s ratio, and residual stress and strain in (111)-oriented scandium nitride thin films on silicon
Year: 2006
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.2217106
Institutions: University of Cambridge, University of Liverpool
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2027042002