Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Dependence on Oxide Particle Density and Cooling Rate
Year: 1991
Type: article
Authors: Z. Laczik, Robert J. Falster, G.R. Booker
Institution: SunEdison (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2028699489
