Modified T-gates incorporating micro-airbridgesto avoid mesa sidewallcontact in AlInAs/GaInAs HEMTs.
Year: 1994
Type: article
Source: Electronics Letters
DOI: 10.1049/el:19941104
Author: W. Patrick
Institution: ETH Zurich
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2029106917
