Work

A new model of haze generation and storage-life-time estimation for mask

Year: 2006

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.688936

Authors: S. Shimada, N. Kanda, N. Takahashi, H. Nakajima, H. Tanaka, H. Ishii, Y. Shoji, M. Otsuki, A. Naito, N. Hayashi

Institution: Dai Nippon Printing (Japan)

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2029318166

FWCI: 5.236

Cites:

Cited by: 10

Related to: 10