Work

Development of an ultrahigh vacuum atomic force microscope for investigations of semiconductor surfaces

Year: 1993

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.586531

Authors: M. Kageshima, H. Yamada, K. Nakayama, H. Sakama, A. Kawazu, T. Fujii, M. Suzuki

Institutions: The University of Tokyo, Nikon (Japan)

Language: English

Topic: Force Microscopy Techniques and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2033252425

FWCI: 1.229

Cites:

Cited by: 20

Related to: 10