Large-numerical-aperture microlens fabrication by one-step etching and mass-transport smoothing
Year: 1994
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.111892
Authors: Z. L. Liau, D. E. Mull, C. L. Dennis, R. C. Williamson, R. G. Waarts
Institutions: MIT Lincoln Laboratory, Massachusetts Institute of Technology
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2034147237