Reactor and growth process optimization for growth of thick GaN layers on sapphire substrates by HVPE
Year: 2005
Type: article
Source: Journal of Crystal Growth
Institutions: Ferdinand-Braun-Institut, Universität Ulm, Aixtron (Germany)
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2034480457
