Work

Optimization of the scanning process in the X-ray-beam-induced current method

Year: 2013

Type: article

Source: Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques

DOI: 10.1134/s1027451013040095

Authors: R. R. Fakhrtdinov, M. V. Grigoriev, V. N. Pavlov

Institutions: Russian Academy of Sciences, Institute of Microelectronics Technology and High Purity Materials

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2044595643

FWCI:

Cites: 4

Cited by: 1

Related to: 10