Work

A combined X‐ray, ellipsometry and atomic force microscopy study on thin parylene‐C films

Year: 2009

Type: article

Source: physica status solidi (a)

DOI: 10.1002/pssa.200881616

Authors: Heinz‐Georg Flesch, Oliver Werzer, Martin Weis, Ján Jakabovič, Jaroslav Kováč, Daniel Haško, Georg Jakopič, Harry J. Wondergem, Roland Resel

Institutions: Graz University of Technology, Slovak University of Technology in Bratislava, International Laser Center, Joanneum Research, Philips (Netherlands)

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funder: Agentúra na Podporu Výskumu a Vývoja

Awards: Rozvoj štrukturálnych metód charakterizácie nanoštruktúr, nanočastíc a progresívnych prvkov pre fotoniku, Progresívne opto a mikroelektronické prvky na báze organických materiálov

OpenAlex ID: W2048749059

FWCI: 0.167

Cites: 10

Cited by: 11

Related to: 10